Close-up of industrial machinery with metallic components and a central cylindrical part inside a square opening.

Custom Design & Engineering of a 3 Axis Ultra High Precision Drive Stage with Linear Encoder for the semiconductor Industry

At Alpine Precision, we leveraged our sister company’s custom design and engineering services to develop a linear encoder drive stage for an OEM. The exceptional mechanical design ensured the linear encoder’s X, Y and Z axes met the client’s range of motion, resolution, repeatability and maximum velocity specifications. This sophisticated stage highlighted and advanced nano-stepping drive package and a software that stored and recalled all the axis coordinates while allowing several different forms of addressing.

When manufacturing the linear encoder drive stage, we utilized high-precision linear bearings and ball screw assemblies in addition to high-vacuum compatible step motors. The PTFE wiring provided durability as well as high-vacuum compatibility. Our rigorous and uncompromising manufacturing process combined with our in-house service and technical support ensured our customer benefited from a linear encoder drive stage that was as durable and reliable as it was precise.

If you’d like more information on our sister company’s custom design and engineering services or our manufacturing capabilities, see the table below or contact us directly.

Project Details

This Linear Encoder was custom designed and manufactured for an OEM as a test platform for the development of a new product.

Product Description

Industry

SEM/FIB, Semiconductor

Capabilities Applied/Processes

Design and Engineering

X Axis
Range of Motion: 106 mm
Resolution: 2.5 nm/step
Repeatability: 0.1 microns
Max Velocity: 8 mm/sec


Y Axis
Range of Motion: 106mm
Resolution: 2.5 nm/step
Repeatability: 0.1 microns
Max Velocity: 8 mm/sec


Z Axis
Range of Motion: 5mm
Resolution: 0.026 nm/step
Repeatability: 0.25 microns
Max Velocity: 0.25 mm/sec

Dynamic Performance

High precision linear bearings and ball screw assemblies

MicroE Systems Mercury II 6800 encoder system

All components precision machined in house

High vacuum compatible step motors

Teflon wiring for durability and high vacuum compatibility

Software package for storage and recall of axis coordinates allows several different modes of addressing

  • Absolute

  • Offset absolute

  • Relative

  • 3-point alignment

Features

Inspection

Helium Leaked Checked to Current Standards

This stage was custom designed and manufactured for an OEM as a test platform for the development of a new product.

  • This stage highlights an advanced nano-stepping drive package, exceptional mechanical design and uncompromising manufacturing practices to meet the OEM’s custom requirements.

  • Service and technical support are provided by our own in house service group.

Additional Facts