Electro Mechanical Assembly Of A 6 Axis High Vacuum Precision Drive Stage For The Semiconductor Industry

Alpine Precision manufactured this sophisticated, technologically-advanced stage from an OEM’s rigorous specifications. This 6 axis drive stage is manufactured in serial production for use in semiconductor defect analysis.  The manufacture of this stage required the incorporation and working knowledge of optical sensors and mechanical switches; high vacuum compatible components, wires, and lubrication; high vacuum material preparation and testing; high precision linear rails, bearings and ball screw assemblies; high performance stepper motors and drives; as well as a number of other best practice considerations associated with performing under high vacuum and high precision positioning. Additionally all custom mechanical components were CNC machined at Alpine Precision.

Custom control plans were developed to ensure compliance with our customer’s specifications as well as domestic and international standards.  Manufacturing process plans were designed to ensure consistency between builds and copy exact compliance.  Critical attention was paid to ensure cosmetically pleasing appearance of finished unit.

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