Custom Design & Engineering of a 3 Axis Ultra High Precision Drive Stage with Linear Encoder for the semiconductor Industry
At Alpine Precision, we leveraged our sister company’s custom design and engineering services to develop a linear encoder drive stage for an OEM. The exceptional mechanical design ensured the linear encoder’s X, Y and Z axes met the client’s range of motion, resolution, repeatability and maximum velocity specifications. This sophisticated stage highlighted and advanced nano-stepping drive package and a software that stored and recalled all the axis coordinates while allowing several different forms of addressing.
When manufacturing the linear encoder drive stage, we utilized high-precision linear bearings and ball screw assemblies in addition to high-vacuum compatible step motors. The PTFE wiring provided durability as well as high-vacuum compatibility. Our rigorous and uncompromising manufacturing process combined with our in-house service and technical support ensured our customer benefited from a linear encoder drive stage that was as durable and reliable as it was precise.
If you’d like more information on our sister company’s custom design and engineering services or our manufacturing capabilities, see the table below or contact us directly.
Project Highlights
Product Description
This Linear Encoder was custom designed and manufactured for an OEM as a test platform for the development of a new product.
Design & Engineering Capabilities Applied/Processes
Primary:
Design/ Engineering
Movement/Performance
X Axis
Range of Motion: 106 mm
Resolution: 2.5 nm/step
Repeatability: 0.1 microns
Max Velocity: 8 mm/sec
Y Axis
Range of Motion: 106mm
Resolution: 2.5 nm/step
Repeatability: 0.1 microns
Max Velocity: 8 mm/sec
Z Axis
Range of Motion: 5mm
Resolution: 0.026 nm/step
Repeatability: 0.25 microns
Max Velocity: 0.25 mm/sec
In process testing/inspection performed
Helium Leaked Checked to Current Standards
Features
- High precision linear bearings and ball screw assemblies
- MicroE Systems Mercury II 6800 encoder system
- All components precision machined in house
- High vacuum compatible step motors
- Teflon wiring for durability and high vacuum compatibility
- Software package for storage and recall of axis coordinates allows several different modes of addressing
- Absolute
- Offset absolute
- Relative
- 3-point alignment
Additional Facts
- This stage was custom designed and manufactured for an OEM as a test platform for the development of a new product.
- This stage highlights an advanced nano-stepping drive package, exceptional mechanical design and uncompromising manufacturing practices to meet the OEM’s custom requirements.
- Service and technical support are provided by our own in house service group.
Industry for Use
Semiconductor Industry
Product Name
Linear Encoder X/Y/Z Stage